Semiconductor Engineering

Comparative Stochastic Process Variation Bands For N7, N5, And N3 At EUV

a) KLA-Tencor Corporation, Austin, TX 78759, U.S.A. b) KLA-Tencor Corporation, Milpitas, CA 95035, U.S.A. Stochastics effects are the ultimate limiter of optical lithography technology and are a major ...