Process integration engineers are gradually losing their battle to keep process variations hidden behind the defensive barrier of tight design rules. Variations in metal line widths, layer thicknesses ...
Process integration engineers are gradually losing their battle to keep process variations hidden behind the defensive barrier of tight design rules. Variations in metal line widths, layer thicknesses ...
Performance metrics for processes are an area of much regulatory interest currently. There isn’t always a readily available clear definition of what is needed, however, and guidance from regulators is ...
A new methodology to assess the impact of fabrication inherent process variability on 14-nm fin field effect transistor (FinFET) device performance. August 18th, 2021 - By: Coventor A new methodology ...
Process design experimental data and risk assessments are used to predict expected process performance and establish process performance qualification acceptance criteria. Per ICH Q8, the aim of ...
This asynchronous course addresses the basic theory behind Statistical Process Control (SPC), a method used in monitoring and controlling the quality of a process through statistical analysis to ...
Variation is becoming a bigger challenge at each new node, but not just for obvious reasons and not always from the usual sources. Nevertheless, dealing with these issues takes additional time and ...