Abstract: We present the design, fabrication, and testing of a new silicon triaxial resonant micro-accelerometer. It is characterized by a biaxial planar resonant micro-accelerometer and a vertical ...

A double-grating-based optical micro mechanical accelerometer with differential detection structure is reported in order to enhance the optical scale factor. A theoretical model is established based ...

Optical displacement detection is widely used in various micro-electro-mechanical system (MEMS) sensors because of its high sensitivity. The optical accelerometer has a high theoretical resolution.

In this study, we research about comb-drive micro-structure, which is a MEMS device used to measure velocities and accelerations. To ensure the accuracy and visualization of the result, we simulate ...

1 Department of Animal Sciences, Purdue University, West Lafayette, IN, United States 2 School of Natural and Environmental Sciences, Newcastle University, Newcastle Upon Tyne, United Kingdom ...

micro_bit_project Python code for the accelerometer The Pure Data (PD) patch provides an interface for users to interact with the device and control its various functions, including the delay effect ...